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Abnormality detecting method for form measuring mechanism and form measuring mechanism | Verfahren zur Feststellung von Abweichungen für einen Formmessmechanismus und Formmessmechanismus | Procédé de détection d'une anomalie pour mécanisme de mesure de forme et mécanisme de mesure de forme

Patentnummer:EP1998137B1
IPC Hauptklasse:G01B002104
Anmelder:Mitutoyo Corporation (0)
20-1, Sakado 1-chome, ; Takatsu-ku, ; Kawasaki, Kanagawa 213-0012, JP
Erfinder:Takahama, Yasuhiro (0)
c/o Mitutoyo Corporation; 20-1, Sakado 1-chome; Takatsu-ku; Kawasaki-shi, Kanagawa 213-8533, JP
Yamagata, Masaoki (0)
c/o Mitutoyo Corporation; 20-1 Sakado 1-chome; Takatsu-ku; Kawasaki-shi, Kanagawa 213-8533, JP
Anmeldung:19.05.08
Offenlegung:30.05.07
Patenterteilung:27.09.17

Abstract / Hauptanspruch
A form measuring mechanism 100 which measures a form of an object 102 to be measured by bringing a probe 124 into direct contact with the object 102, includes a plurality of reference spheres 130a and 130b for calibrating the form of the probe 124, a judging means 154 for judging form abnormal values common in position and size to each other and form abnormal values not common to each other obtained by measuring the reference spheres 130a and 130b, and a notifying means 156 for notifying at least any one of a contamination or dust adhering state of the probe 124 judged from the common form abnormal values and a worn state and contamination or dust adhering states of the reference spheres 130a and 130b judged from the form abnormal values not common to each other. Accordingly, it becomes possible to identify contamination or dust adhesion of the probe or contamination or deformation due to wearing of the reference sphere, and at least in the case of contamination or dust adhesion of the probe or reference sphere, the location of the contamination or dust adhesion can be identified, and in the case of wearing of the probe or the reference sphere, a situation of the worn region can be identified or necessity of replacement of the probe or the reference sphere can be judged.

EP1998137B1


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