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Anmelder = ASML NETHERLANDS B.V., Veldhoven


Erteilte Patente in der Einspruchsfrist

(DE B,C: 3 Monate nach Erteilung; EP B,C: 9 Monate nach Erteilung)

Patentschrift
Erteilung (Frist)
Anmelder
Titel der Erfindung (Arbeitstitel)
US9982991B2
29.05.18 (5)
Method for controlling a distance between two objects, inspection apparatus and method
ASML NETHERLANDS B.V., Veldhoven
US10001710B2
19.06.18 (24)
Inspection apparatus, inspection method, lithographic apparatus and manufacturing method
ASML NETHERLANDS B.V., Veldhoven
US10042268B2
07.08.18 (73)
Method, apparatus and substrates for lithographic metrology
ASML NETHERLANDS B.V., Veldhoven
US10073357B2
11.09.18 (108)
Measuring a process parameter for a manufacturing process involving lithography
ASML NETHERLANDS B.V., Veldhoven
US10107761B2
23.10.18 (150)
Method and device for focusing in an inspection system
ASML NETHERLANDS B.V., Veldhoven
US10162271B2
25.12.18 (214)
Metrology method and apparatus, substrate, lithographic system and device manufacturing method
ASML NETHERLANDS B.V., Veldhoven
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