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Anmelder = ASML NETHERLANDS B.V., Veldhoven


Erteilte Patente in der Einspruchsfrist

(DE B,C: 3 Monate nach Erteilung; EP B,C: 9 Monate nach Erteilung)

Patentschrift
Erteilung (Frist)
Anmelder
Titel der Erfindung (Arbeitstitel)
US9851246B2
26.12.17 (2)
Method and apparatus for inspection and metrology
ASML NETHERLANDS B.V., Veldhoven
US9869940B2
16.01.18 (22)
Metrology method and apparatus, computer program and lithographic system
ASML NETHERLANDS B.V., Veldhoven
US9879988B2
30.01.18 (36)
Metrology method and apparatus, computer program and lithographic system
ASML NETHERLANDS B.V., Veldhoven
US9927726B2
27.03.18 (94)
Polarization independent interferometer
ASML NETHERLANDS B.V., Veldhoven
US9927699B2
27.03.18 (94)
Imprint lithography
ASML NETHERLANDS B.V., Veldhoven
US9933250B2
03.04.18 (101)
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
ASML NETHERLANDS B.V., Veldhoven
US9939250B2
10.04.18 (108)
Methods and apparatus for calculating electromagnetic scattering properties of a structure and for estimation of geometrical and material parameters thereof
ASML NETHERLANDS B.V., Veldhoven
US9946167B2
17.04.18 (115)
Metrology method and inspection apparatus, lithographic system and device manufacturing method
ASML NETHERLANDS B.V., Veldhoven
US9982991B2
29.05.18 (157)
Method for controlling a distance between two objects, inspection apparatus and method
ASML NETHERLANDS B.V., Veldhoven
US10001710B2
19.06.18 (176)
Inspection apparatus, inspection method, lithographic apparatus and manufacturing method
ASML NETHERLANDS B.V., Veldhoven
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