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Anmelder = ASML NETHERLANDS B.V., Veldhoven


Erteilte Patente in der Einspruchsfrist

(DE B,C: 3 Monate nach Erteilung; EP B,C: 9 Monate nach Erteilung)

Patentschrift
Erteilung (Frist)
Anmelder
Titel der Erfindung (Arbeitstitel)
US9645512B2
09.05.17 (21)
Substrate distortion measurement
ASML NETHERLANDS B.V., Veldhoven
US9733572B2
15.08.17 (116)
Method and apparatus for measuring asymmetry of a microstructure, position measuring method, position measuring apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS B.V., Veldhoven
US9746312B2
29.08.17 (130)
Lithographic apparatus and method for measuring a position
ASML NETHERLANDS B.V., Veldhoven
US9746785B2
29.08.17 (130)
Sub-wavelength segmentation in measurement targets on substrates
ASML NETHERLANDS B.V., Veldhoven
US9760018B2
12.09.17 (144)
Method and inspection apparatus and computer program product for assessing a quality of reconstruction of a value of a parameter of interest of a structure
ASML NETHERLANDS B.V., Veldhoven
US9766552B2
19.09.17 (151)
Methods and apparatus for calculating electromagnetic scattering properties of a structure and for reconstruction of approximate structures
ASML NETHERLANDS B.V., Veldhoven
US9772562B2
26.09.17 (158)
Method and apparatus for measuring a structure on a substrate, models for error correction, computer program products for implementing such methods and apparatus
ASML NETHERLANDS B.V., Veldhoven
US9778025B2
03.10.17 (165)
Method and apparatus for measuring asymmetry of a microstructure, position measuring method, position measuring apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS B.V., Veldhoven
US9778022B1
03.10.17 (165)
Determining moving properties of a target in an extreme ultraviolet light source
ASML NETHERLANDS B.V., Veldhoven
US9811006B2
07.11.17 (200)
Method of determining a measurement subset of metrology points on a substrate, associated apparatus and computer program
ASML NETHERLANDS B.V., Veldhoven
US9811001B2
07.11.17 (200)
Method and apparatus for inspection and metrology
ASML NETHERLANDS B.V., Veldhoven
US9851246B2
26.12.17 (250)
Method and apparatus for inspection and metrology
ASML NETHERLANDS B.V., Veldhoven
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