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Anmelder = NIKON CORPORATION


Erteilte Patente in der Einspruchsfrist

(DE B,C: 3 Monate nach Erteilung; EP B,C: 9 Monate nach Erteilung)

Patentschrift
Erteilung (Frist)
Anmelder
Titel der Erfindung (Arbeitstitel)
US9816805B2
14.11.17 (83)
Compensation for Goos-Hanchen error in autofocus systems
NIKON CORPORATION
EP2489989B1
15.11.17 (84)
Photoelectronic encoder | Fotoelektronischer Positionsgeber | Codeur photoélectrique
NIKON CORPORATION
US9823091B2
21.11.17 (90)
Encoder system, signal processing method, and transmission signal generation and output device
NIKON CORPORATION
US9846374B2
19.12.17 (119)
Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method
NIKON CORPORATION
US9846027B2
19.12.17 (119)
Measuring apparatus, method, and program
NIKON CORPORATION
US9857697B2
02.01.18 (132)
Pattern forming apparatus, mark detecting apparatus, exposure apparatus, pattern forming method, exposure method, and device manufacturing method
NIKON CORPORATION
US9891043B2
13.02.18 (174)
Profile measuring apparatus, structure manufacturing system, method for measuring profile, method for manufacturing structure, and non-transitory computer readable medium
NIKON CORPORATION
EP2573510B1
14.02.18 (175)
SHAPE MEASURING DEVICE AND SHAPE MEASURING METHOD | FORMMESSVORRICHTUNG UND FORMMESSVERFAHREN | DISPOSITIF DE MESURE DE FORME ET PROCÉDÉ DE MESURE DE FORME
NIKON CORPORATION
US9897437B2
20.02.18 (181)
Profile measuring apparatus, structure manufacturing system, method for measuring profile, method for manufacturing structure, and non-transitory computer readable medium
NIKON CORPORATION
US9921055B2
20.03.18 (211)
Shape measurement device, structure production system, shape measurement method, structure production method, and shape measurement program
NIKON CORPORATION
Neuer Eintrag!
EP3023736B1
28.03.18 (219)
DEVICE, METHOD AND PROGRAM FOR SHAPE MEASUREMENT, AS WELL AS STRUCTURAL OBJECT PRODUCTION SYSTEM | VORRICHTUNG, VERFAHREN UND PROGRAMM ZUR FORMVERMESSUNG, SOWIE STRUKTUROBJEKTHERSTELLUNGSSYSTEM | DISPOSITIF, PROCÉDÉ ET PROGRAMME POUR LA MESURE DE FORME, AINSI QUE SYSTÈME DE PRODUCTION D'OBJET STRUCTUREL
NIKON CORPORATION
Neuer Eintrag!
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