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Anmelder = NIKON CORPORATION


Erteilte Patente in der Einspruchsfrist

(DE B,C: 3 Monate nach Erteilung; EP B,C: 9 Monate nach Erteilung)

Patentschrift
Erteilung (Frist)
Anmelder
Titel der Erfindung (Arbeitstitel)
US9625834B2
18.04.17 (33)
Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method
NIKON CORPORATION
US9733070B2
15.08.17 (150)
Shape measuring apparatus, structure manufacturing system, stage apparatus, shape measuring method, structure manufacturing method, program, and recording medium
NIKON CORPORATION
US9740114B2
22.08.17 (157)
Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method
NIKON CORPORATION
US9816805B2
14.11.17 (241)
Compensation for Goos-Hanchen error in autofocus systems
NIKON CORPORATION
Neuer Eintrag!
EP2489989B1
15.11.17 (242)
Photoelectronic encoder | Fotoelektronischer Positionsgeber | Codeur photoélectrique
NIKON CORPORATION
Neuer Eintrag!
US9823091B2
21.11.17 (248)
Encoder system, signal processing method, and transmission signal generation and output device
NIKON CORPORATION
Neuer Eintrag!